Heteroepitaxial Growth of GaN on Unconventional Templates and LayerTransfer Techniques for LargeArea, Flexible/Stretchable LightEmitting Diodes
نویسندگان
چکیده
temperature. This wide spectral range enables potential applications from the infrared to the deep ultraviolet regions of the electromagnetic spectrum. This makes GaN-based nitrides one of the most important materials for light sources such as light-emitting diodes (LEDs). [ 1–5 ] Sapphire has long been used as a substrate for GaN-based LEDs, and silicon (Si) is becoming its strong competitor due to the advantages of its scalability and lower production costs. [ 6–10 ] Lattice mismatch values (defi ned here as (a GaN –a sub )/a sub ) of GaN on sapphire and Si are as high as 16.1 and –16.9%, respectively. As a consequence, the resulting GaN layers are highly defective, with a typical threading dislocation density (TDD) in the range of about 1×10 8 –2×10 10 cm −2 , [ 11–13 ] which is fi ve orders of magnitude larger than that for conventional AlGaAs or AlInGaP LED materials. Nevertheless, GaN-based materials, including In x Ga 1− x N, exhibit highly effi cient photoluminescence (PL) (more than 50% effi ciency), which poses interesting questions as to the role of the defects. [ 14–18 ] Even polycrystalline In x Ga 1–x N materials have intriguing PL characteristics. [ 19,20 ] Such PL characteristics, which are insensitive to lattice mismatch or the TDD, motivate further studies into the growth of GaN on unconventional substrates such as glass, which are scalable to much larger areas with lower costs than Si. [ 21,22 ] However, there remain two major challenges for exploiting glass as a growth template for GaNbased optoelectronic devices: its amorphous nature and its low melting point. The former impedes epitaxial growth, and the latter results in poor crystal quality, yielding randomly oriented, polycrystalline GaN. Here, we review recent progress in heteroepitaxial growth of GaN, both on amorphous and on large-scale single-crystalline substrates through the use of appropriate interlayers (ILs), as well as progress in low-temperature GaN growth which has enabled successful demonstrations of GaN-based red–green– blue (RGB) LEDs on glass substrates. [ 23–28 ] We also review layer-transfer techniques for GaN thin fi lms grown on ILs onto foreign substrates for high-performance fl exible/stretchable lighting applications. Large-scale, fl exible inorganic LEDs could be applied for fl exible LED TV displays, large-scale Heteroepitaxial Growth of GaN on Unconventional Templates and Layer-Transfer Techniques for Large-Area, Flexible/Stretchable Light-Emitting Diodes
منابع مشابه
Blue to true green LEDs with semipolar quantum wells based on GaN nanostripes
Recent advances of the performance of GaN based devices with semipolar quantum wells have been realized homoepitaxially on pseudo bulk substrates which are typically small in size and high in cost. These limitations fuel the search for cheap and large area alternatives. Heteroepitaxial growth on sapphire substrates is well established with excellent results for polar GaN structures the growth o...
متن کاملAbbreviated MOVPE nucleation of III-nitride light-emitting diodes on nano-patterned sapphire
Metalorganic vapor phase epitaxy (MOVPE) nucleation studies of GaN on planar sapphire and nanopatterned AGOG (Deposition of Aluminum, Growth of Oxide, and Grain growth) sapphire substrates were conducted. The use of abbreviated GaN growth mode, which utilizes a process of using 15 nm low-temperature GaN buffer and bypassing etch-back and recovery processes during epitaxy, enables the growth of ...
متن کاملKinetic surface roughening and wafer bow control in heteroepitaxial growth of 3C-SiC on Si(111) substrates
A thin, chemically inert 3C-SiC layer between GaN and Si helps not only to avoid the "melt-back" effect, but also to inhibit the crack generation in the grown GaN layers. The quality of GaN layer is heavily dependent on the unique properties of the available 3C-SiC/Si templates. In this paper, the parameters influencing the roughness, crystalline quality, and wafer bow are investigated and engi...
متن کاملMetalorganic vapor phase epitaxy and characterizations of nearly-lattice-matched AlInN alloys on GaN/sapphire templates and free-standing GaN substrates
The epitaxy optimization studies of high-quality n-type AlInN alloys with different indium contents grown on two types of substrates by metalorganic vapor phase epitaxy (MOVPE) were carried out. The effect of growth pressure and V/III molar ratio on growth rate, indium content, and surface morphology of these MOVPE-grown AlInN thin films were examined. The surface morphologies of the samples we...
متن کاملInGaN/GaN multiple quantum wells grown on nonpolar facets of vertical GaN nanorod arrays.
Uniform GaN nanorod arrays are grown vertically by selective area growth on (left angle bracket 0001 right angle bracket) substrates. The GaN nanorods present six nonpolar {1⁻100} facets, which serve as growth surfaces for InGaN-based light-emitting diode quantum well active regions. Compared to growth on the polar {0001} plane, the piezoelectric fields in the multiple quantum wells (MQWs) can ...
متن کامل